Case Study

pH meter for fluoride treatment in semiconductor factory

pH meter for fluoride treatment in semiconductor factory

Application Note The hydrofluoric acid waste must be neutralized before it can re-enter the environment. Figure 1 shows an example of the neutralization process. pH meters are used to measure and control the neutralization process. Lime, (Ca(OH)2), is injected into the neutralization tank to capture the fluorine atoms. The chemical reaction is described The AH-151 from HORIBA automates this pH monitoring process steps of monitoring, cleaning and calibrating. The Lifting Unit shown in Figure 3 removes the electrode from the process tank so the Operations Unit can control the cleaning and calibration processes. The CaF2 suspended solid generated in the neutralization process sticks to all of the components of the system including the pH electrode. Figure 2 shows the scale coverin

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