Central Air Abatement System (CAAS) Scrubbing in Semiconductor Manufacturing # 108 Application CAAS Exhaust Exhaust Volume  25,000 CFM per tower (24 Systems provided) Exhaust Temperature  80° F Exhaust Pressure  2.6” W.C. per tower Contaminant  HCl, HF, HBr, HNO 3 , H 3 PO 4 , NH 3 Removal Efficiency  99% per tower Scrubbing Solution  Dilute NAOH or H 2 SO 4 Materials of Construction FRP VERANTIS E n v i r o n m e n t a l S o l u t i o n s G

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