Case Study
VOC Abatement for Semiconductor Fabrication
Cost Effective Solution for Semiconductor Industry Zeol Division Benefits of Using Rotor Concentrator Technology over an RTO High Reliability • Steady Exhaust Pressure • Energy Reduction • Operating Cost Savings • Smaller footprint • Easy installation • Low maintenance • In 2006, Munters Zeol provided air pollution abatement equipment to control solvent emissions from ST Microelectronics’ semiconductor fabrication plant in Phoenix, Ar