Case Study

VOC Abatement for Semiconductor Fabrication

VOC Abatement for Semiconductor Fabrication

Pages 2 Pages

Cost Effective Solution for Semiconductor Industry Zeol Division Benefits of Using Rotor Concentrator Technology over an RTO High Reliability • Steady Exhaust Pressure • Energy Reduction • Operating Cost Savings • Smaller footprint • Easy installation • Low maintenance • In 2006, Munters Zeol provided air pollution abatement equipment to control solvent emissions from ST Microelectronics’ semiconductor fabrication plant in Phoenix, Ar

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