Developing nanopositioning machines with dSPACE tools for the Nano World Workbench page 20 TU ILMeNaU dSPACE Magazine 1/2009 · © dSPACE GmbH, Paderborn, Germany · info@dspace.com · www.dspace.comJust as Moore’s Law predicts, the semiconductor industry is doubling the number of transistors per unit of area almost every two years. Processing such tiny structures requires precise positioning ma- chines that move the processing tools to defi ned positions quickly and reproducibly. A team at the Technische Universität Ilmenau in Germany has designed a very versatile positioning machine for work in the nanometer range. The machine is controlled with the aid of dSPACE hardware and software. A fi ne needle, its tip only a few atoms wide, measures the surface of a sample. Each

Join for free to read