Quartz TCs last up to 3X longer in ASM® EPSILON® reactors Conax introduces a patent-pending coating that extends the life of quartz thermocouple sheaths in ASM ® EPSILON ® reactors up to 3X longer. Industry: Semiconductor Challenge: In many epitaxial processes, deterioration and failure of the quartz sheath protecting thermocouples (TCs) is the determining factor when designing maintenance schedules and can be the cause of non-scheduled maintenance activities. Such unplanned events of premature TC failure costs the Fab valuable production time and affects the maintenance budget. Conax wanted to develop a solution that could drastically increase the usage/lifetime of these TCs, and significantly reduce premature failures. Solution: Conax embarked on an 8-year venture to develop an advance

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