Polysilicon Production Facility tcs Process Vent s crubbing A major polysilicon production facility in China sought a solution to economically and reliably remove silane and acid wastes from their process vent gas system. The process gas stream contained large amounts of H 2 in addition to contaminants and nitrogen. The production of trichlorosilane (TCS) is a critical step in the manufacture of polysilicon for the solar cell industry.

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