Name: OSRAM Regensburg Location: Burgweinting, Germany Owner: OSRAM Project Services: Turnkey design and installation of 15 high purity capacity chemical and slurry distribution systems. Other services included: • Tool installation, hook-up and qualification • Installation of auxiliary equipment • Installation of valve manifold boxes • Installation of day tanks and drum cabinets KINETICS CONFIDENTIAL KINETICS CONFIDENTIAL MICROELECTRONICS

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