Depth Profile analysis of organic and organic/inorganic multilayered materials
Depth Profile analysis of organic and organic/inorganic multilayered materials
2 PagesGDOES Patrick Chapon, HORIBA Scientific, 16 rue du Canal, 91160 Longjumeau, France Introduction GDOES relies on the fast sputtering of a representative area of the material of interest by a dense plasma and the real time optical analysis of the emission light produced by the sputtered species excited by the same plasma. With the development of pulsed RF source and the invention of the “UFS” (Ref 1 and Application Note AN GD21), the technique now contributes to the development and characterization of polymeric materials (as shown in references 2 to 6). Additives can be seen and localized, the structure of the material can be revealed quickly and therefore the elaboration process can be controlled and optimized. Figure 1 illustrates a GDOES depth profile on a multilayered polymer.
