Analysis of films on glass by pulsed RF GDOES
Analysis of films on glass by pulsed RF GDOES
2 PagesGDOES Patrick Chapon, HORIBA Scientific, 16 rue du Canal, 91160 Longjumeau, France Introduction Coatings on glass are extensively used in multiple domains from thin films PV cells to optical coatings, IR protective layers on windows to gold coatings on the HORIBA Scientific SPRi prisms! Figure 1: HORIBA Scientific SPRi chips Multiple deposition techniques are used to coat glasses (PVD, sol gel dip coating, CVD etc – Ref 1). GDOES permits to rapidly obtain the elemental depth profiles and assess the quality of the coatings and the reproducibility of the selected deposition technique (Ref 2). Figure 2: Depth profile of a SPRi prism featuring the Au top layer on a sublayer on glass Instrumentation The GD Profiler 2 couples an advanced Pulsed RF Glow Discharge Source to a high resolutio
