A 3,000 m3/day Tubular Membrane Filter (TMF™) System Installed in Korea for Wafer Backgrinding Water Reclamation
A 3,000 m3/day Tubular Membrane Filter (TMF™) System Installed in Korea for Wafer Backgrinding Water Reclamation
10 PagesPOREX FILTRATION Page 1 of 10 CASE STUDY WAFER BACKGRINDING | A 3,000 m 3 /day Tubular Membrane Filter (TMF™) System Installed in Korea for Wafer Backgrinding Water Reclamation About Wafer Backgrinding Wastewater During the deposition, etching and intermediate CMP stages, the thickness of a semiconductor integrated circuit wafer is typically kept at three or more times greater than required for the final device. The extra thickness ensures
