Case Study

Wafer Carrier

Wafer Carrier

Pages 3 Pages

Wafer Carrier RTP Company End-Use Case Study Overmolding Ensures Dimensional Stability and Low Particulate Levels Modern automated wafer handling processes have increased the need for tighter tolerances on wafer carriers. Entegris, Inc., is the first company to make significant changes to the original linear wafer carriers developed in the early 1970’s. Its new KA250 Advanced Wafer Transport Carrier features polycarbonate overmolded with a conductive RTP 2200 Series specialty compound based on Victrex PEEKTM resin. “Heightened wafer-carrier requirements are largely a result of technological advancements in semiconductor processes,” said Sanjiv M. Bhatt, Ph.D., Project Engineer at Entegris. “The dramatic increase in the level and complexity of automation requires a wafer carrier that offers

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