1 Surface measurements with picometer resolution Nikon’s new Focus Variation with White Light Interferometry (FVWLI) moves the technique into new ground. With effective height resolution of 15 pm (picometer), more precise and accurate 3D surface height measurements are now achievable. Integrating Nikon’s existing industrial research grade microscope range with the latest WLI technology, Nikon is able to combine a WLI system, with standard

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