Case Study

Semiconductor Manufacturer Reduces Total Cost of Filtration by More Than 50% Using Fewer Filters in an Existing System

Semiconductor Manufacturer Reduces Total Cost of Filtration by More Than 50% Using Fewer Filters in an Existing System

Pages 2 Pages

g or e. c om/filt er s Situation At a US semiconductor manufacturer, the polishing loop pre-filters in the UPW facility were causing concern due to a charge loss and reduced performance. The facility team sought the most cost- effective way to replace the filters while maintaining water quality specification. • UPW loop: 2200 GPM separated into 3 loops • UF final filter with 0.2 µm charged Nylon pre-filters • Pre-filters: seven (7) 30-roun

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