Semiconductor Maker Improves Lithography Overlay Performance Through Workflow Automation Based Run To Run Control
Semiconductor Maker Improves Lithography Overlay Performance Through Workflow Automation Based Run To Run Control
4 PagesSemiconductor Maker Improves Lithography Overlay Performance Through Workflow Automation Based Run-to-Run Control A U.S.-based semiconductor manufacturer, operating a 200,000 square-foot facility that includes 62,000 square feet of clean room space for wafer fabrication, was in pursuit of better control of its processes. To that end, this semiconductor manufacturer worked with Savigent Software, using Savigent Work?ow ™ (work?ow automat
