SEMICONDUCTORS AND SOLAR APPLICATION NOTE 5.00.02 KOH ETCH OF SILICON w w w . k p a t e n t s . c o m POTASSIUM HYDROXIDE, KOH Typical end products Silicon wafers for semiconductors and microelectronics, MEMS (microelectromechanical systems), micromachines etc. Chemical curve: Potassium hydroxide R.I. per Conc% b.w. at Ref. Temp. of 20°C Introduction Wet etching is used to chemically remove layers (metal, silicon,

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