APPLICATION NOTE Oxygen and Nitrogen determination in Aluminium Nitride Alain Salaville and Jocelyne Marciano, Application Laboratory, HORIBA Jobin Yvon S.A.S., Longjumeau, FRANCE Seiji Sakakura and Satoshi Yoshida, HORIBA Application Laboratory, Kyoto, JAPAN Written by Kinumi Hayashi, HORIBA R&D Department, Kyoto JAPAN Keywords: EMGA 920, Aluminium nitride, Oxygen, Nitrogen, Elemental Analyzer Carbon/Sulfur, Oxygen/Nitrogen & Hydrogen Analyzer APPLICATION NOTE 36 1 Introduction Aluminium nitride is principally used for its high thermal conductivity combined with a high elec- trical resistivity. So it’s an interesting heat dissi- pator in electric and electronic applications especially as its thermal expansion coefficient is close to the silicon. Moreover, AlN is resistant to oxidation a

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