Case Study
High-Accuracy and Traceable AFM Measurements on Semiconductors and Step Standards
SUCCESS STORY – High-Accuracy and Traceable AFM Measurements on Semiconductors and Step Standards -- Gernot Hamann -- Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 1 of 4 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws High-Accuracy and Traceable AFM Measurements on Semiconductors and Step Standards Positioning in Sub-Nanometer Resolution SUCCESS STORY