Packaging Characterization of Barrier Layers by Spectroscopic Ellipsometry for Packaging Applications Michel Stchakovsky, Mélanie Gaillet - Application Scientists - Thin Film Division The experimental data were acquired at an angle of 70° across the spectral range 1.5 – 6.5 eV using the UVISEL FUV spectroscopic ellipsometer. The characterization of the sample was performed in two steps: Characterization of the PET substrate Characterization of the barrier coating deposited on PET In the visible region from 1.5 – 4 eV the PET substrate is trans- parent introducing interference fringes caused by reflections from the backside of the substrate film. At higher photon en- ergies the substrate becomes completely absorbing and this feature may be exploited to avoid reflections from the back- s

Join for free to read