Mattson Wet Products GmbH is a world-wide supplier of semiconductor manu- facturing equipment that pretty much followed this route. Having used CANopen with VME systems in selected lines before, Mattson decided to introduce PC based controls as their next generation control architecture. And CANopen was chosen to be the communication system. Mattson launched a full scale evalua- tion project and finally chose Beckhoff as main supplier for both ha

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