Copyright Cypress Envirosystems 2008 Page 1 October 2008 ABC Semiconductor Case Study: Improving CMP Yield October 2008 The Challenge: ABC Semiconductor operates an 8-inch fab in Texas with an average of 20,000 wafer starts per month. As part of the production process, it uses twenty seven Chemical Mechanical Planarization (CMP) tools manufactured by Westech, model 472 (circa 1995 vintage). The CMP tools are used at vari

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