A 100-fold Improvement in Lithography Resolution Realized With a 150-year-old “Perfect Imaging” System

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26 COMSOL MULTIPHYSICS MAY 2013 BACK IN THE mid-19th century, the famed Scottish physicist James Clerk Maxwell proposed a “perfect imaging” system with a positive refractive index. The gradient index lens he proposed—dubbed the Maxwell fish-eye (MFE)—is a lens that can image any point outside the lens to a correspond- ing point on the same surface. It was supposedly capable of “perfect imaging,” in which the smallest details could be resolv

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A 100-fold Improvement in Lithography Resolution Realized With a 150-year-old “Perfect Imaging” System

A 100-fold Improvement in Lithography Resolution Realized With a 150-year-old “Perfect Imaging” System

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